In this particular paper, The brand new lapping slurry and sharpening slurry are released. As well as the deliquescence degree of CLBO is fallen to least expensive. A new Functioning technology is usually adopted. Right after tough sprucing, the concentration of ultra-precision polishing slurry is improved appropriately. So does the ultra-precision polishing speed, and also the wiping speed is quicker in comparison to the deliquescence pace. The CLBO crystal area roughness can attain 1nm and preserve the surface area top quality properly. Entry via your institution
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In accordance with the evidence-of-principle experiment, the conversion efficiency of 23% implied the potential of attaining substantial-electric power at the next Stokes wavelength on the Raman laser. In case the pump laser of 1078 nm could possibly be attained at the standard ability of fifty W, the output electric power of its 2nd Stokes wavelength at 1512 nm may very well be much more than ten W. The design from the Raman laser cavity should be optimized in an effort to stay away from the injury on the M1 and diamond floor.
The common ability with the NIR laser even now has the prospective to become enhanced to tens of watts for example 70 W [26] In the event the double-go configuration could possibly be utilized with the Yb:YAG SCF amplifier phase. Consequently, When the conversion performance of 31% from NIR to DUV could possibly be nevertheless maintained at this greater electricity condition, the common output ability in the DUV laser at 258 nm may be more than 20 W, which would be considered a extraordinary energy amount with the DUV laser and bring about the unanticipated DUV laser machining outcomes. Additionally, for top-electricity DUV laser, the UV destruction of the nonlinear crystal, including the windows for CLBO crystal plus the mirrors, is yet another crucial parameter for long lasting and stable Procedure.
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On one other aspect, the power scaling of your NIR laser is an additional factor to enhance the ordinary electric power on the 193-nm DUV laser. As a result of lack of the significant-electricity amplification Answer with the NIR laser (by way of example at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) can be placed on create a wavelength converter by shifting the wavelength from one μm to the desired wavelength together with obtaining relative better energy [21]. A short while ago, a diamond Raman laser showed its skill in achieving a substantial power and a substantial conversion performance in the 1st Stokes of your one-μm laser [22,23], which means the chance to be applied within the 193-nm DUV laser generation due to its higher Raman acquire and large frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of your Nd:YAG essential laser wavelength. So that you can greatly enhance the destruction threshold, very low CLBO floor roughness, by ultra-precision machining, is needed. As the CLBO crystal has quick hydroscopic reaction and micro scratches in machining, extremely-exact machining in the CLBO crystal is a hard specialized problem.
The beam profile proven in Figure 7b demonstrated a fantastic beam quality as CLBO Crystal one of several deserves of Raman laser, which might be valuable to deliver a 193-nm DUV laser with a top quality beam.
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The development on the 193-nm laser was shown by stages of SFG. So as to scale the DUV laser energy properly, a new notion with the 193-nm DUV laser technology is presented depending on the diamond Raman laser.